发明名称 METHOD AND SYSTEM FOR MONITORING COMPONENT CONSUMPTION
摘要 A method for monitoring consumption of a component, including the steps of emitting a radiation beam onto a first area of the component and detecting a portion of the radiation beam that is refracted by the component. A radiation level signal is generated based at least on a strength of the detected portion of the radiation beam, and a thickness of the component is determined based on the radiation level signal. The thickness of the component is compared to a predetermined thickness value, and a status signal is generated when the comparing step determines that the thickness of the component is substantially equal to or below the predetermined thickness value. When the comparing step determines that the thickness of the component is greater than the predetermined thickness value, the component is exposed to a process that can erode at least a portion of the component.
申请公布号 US2007192059(A1) 申请公布日期 2007.08.16
申请号 US20070736789 申请日期 2007.04.18
申请人 TOKYO ELECTRON LIMITED 发明人 MITROVIC ANDREJ S.;STRANG ERIC J.
分类号 G06F15/00;G01B11/06;H01J37/32 主分类号 G06F15/00
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