| 摘要 |
PROBLEM TO BE SOLVED: To provide an intra-cell film thickness measuring apparatus provided with an autofocusing means which detects an in-focus position surely and quickly even for an object to be measured having no pattern without using a dummy pattern. SOLUTION: Apart from observation lighting and its lighting optical system for positioning a sample on which a thin film pattern is formed and identifying a cell to be measured, measuring lighting and its lighting optical system are provided for measuring an intra-cell film thickness of the cell to be measured. The in-focus position is detected surely and quickly by irradiating the sample with the measuring lighting to form a differential component in an image signal at all times even when the object to be measured is a reference having no differential component and when a pattern does not exist in a field of view. COPYRIGHT: (C)2007,JPO&INPIT
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