发明名称 |
HIGH-PRESSURE FLUIDIZED BED REACTOR FOR PREPARING GRANULAR POLYCRYSTALLINE SILICON |
摘要 |
<p>The present invention relates to a high-pressure fluidized bed reactor for preparing granular polycrystalline silicon, comprising (a) a reactor tube, (b) a reactor shell encompassing the reactor tube, (c) an inner zone formed within the reactor tube, where a silicon particle bed is formed and silicon deposition occurs, and an outer zone formed in between the reactor shell and the reactor tube, which is maintained under the inert gas atmosphere, and (d) a controlling means to keep the difference between pressures in the inner zone and the outer zone being maintained within the range of 0 to 1 bar, thereby enabling to maintain physical stability of the reactor tube and efficiently prepare granular polycrystalline silicon even at relatively high reaction pressure.</p> |
申请公布号 |
WO2007091834(A1) |
申请公布日期 |
2007.08.16 |
申请号 |
WO2007KR00657 |
申请日期 |
2007.02.07 |
申请人 |
KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY;KIM, HEE YOUNG;YOON, KYUNG KOO;PARK, YONG KI;CHOI, WON CHOON |
发明人 |
KIM, HEE YOUNG;YOON, KYUNG KOO;PARK, YONG KI;CHOI, WON CHOON |
分类号 |
C01B33/027;C30B28/14;C30B29/06 |
主分类号 |
C01B33/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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