| 摘要 |
PROBLEM TO BE SOLVED: To provide a new and improved device and a method in which a clamping method is automated by arranging mechanically a cap of a vacuum chuck on a disk, without requiring physical intervention of an operator. SOLUTION: The mechanism for arranging and removing the vacuum clamping device for a magnetic disk on a spin stand is provided with automated vertical and horizontal moving constitution for using the vacuum disk chuck provided with a base (9) and a cap (6). A linear actuator gives horizontal (2) and vertical (3) moving force in order to arrange accurately the chuck cap (6) on the magnetic disk (7) provided on the chuck base (9). The actuator removes the cap from the disk and the cap is used for keeping away it from the disk. The mechanism is designed so that the cap is held surely during operation and wear and minute particles accompanying it are not caused. COPYRIGHT: (C)2007,JPO&INPIT
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