| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a droplet discharge head enabling a nozzle working which copes with both a desired taper shape and a discharging port accuracy. SOLUTION: A perforation working with the taper shape of a large angle is performed for a work 18 at the first working position. The work 18 is moved to the second working position (=imaged position) and worked with a laser beam 12 imaged with the same pattern as the one of the mask 14. Thereby, the elements such as burr which may affect the discharging performance can be removed by enlarging the opening diameter of the discharging port 24 of a nozzle 22 to an original 20μm and preparing the pitch between the opening diameter and the nozzle together with the shape near the discharging port 24. Since the second working is performed with the taper angle of an approximate 8°and a near straight tube structure, the nozzle 22 can be formed with an ideal structure such that the nozzle section has a small taper angle (nearly straight tube) at the neighborhood of the discharging port 24 and a large taper angle at the side far from the discharging port 24 (upper than the middle in Fig.2(b)) as shown in Fig.2(b) when the second working is finished. COPYRIGHT: (C)2007,JPO&INPIT
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