| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus and laser beam machining method that can minimize damage to the surface of a workpiece. <P>SOLUTION: The laser beam machining apparatus is equipped with: a laser oscillator 2 for emitting a laser beam L; a placing table 3 for placing the workpiece W thereon; a machining optical means 5 that converges the laser beam L emitted from the laser oscillator 2 and irradiates the workpiece W on the placing table 3 with the converged laser beam L; and a waveguide member 6 that is arranged above the workpiece W leaving a minute gap and that is provided with a hollow waveguide having nearly the same diameter as the minute spot diameter of the machining optical means 5, wherein the hollow waveguide transmits the incident laser beam L to the workpiece W. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
