| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus and raw material silicon filling method, wherein raw material silicon can be efficiently filled and operating time can be shortened when a large amount of raw material silicon is filled in a raw material silicon filling process after pulling a single crystal. SOLUTION: The single crystal pulling apparatus comprises: a first chamber 2 for accommodating a crucible 3; a second chamber 12 which is connected onto the first chamber 2 and sets a feeding vessel in which the raw material silicon L is filled; a first feeding vessel 13 which is transferred from the inside of the second chamber 12 to the first chamber 2 and held at the inside of the first chamber 2 and feeds the raw material silicon L into the crucible 3; and a second feeding vessel 25 which is transferred from the inside of the second chamber 12 to the inside of the first chamber 2 and fitted at the inside of the first feeding vessel 13, and feeds the raw material silicon L into the crucible 3. COPYRIGHT: (C)2007,JPO&INPIT
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