| 摘要 |
PROBLEM TO BE SOLVED: To reliably measure a temperature with improved reproducibility and uniformity. SOLUTION: A method for compensating the readout of a temperature probe in a heat treating chamber for heating a substrate has a step that heats the substrate to a process temperature, a step that measures a temperature of the substrate using a first probe and a second probe, and a step that derives the compensation of a temperature readout to the first probe from a first temperature indicated by the first temperature and a second temperature indicated by the second temperature and derives the compensation that is the indicated value of an actual temperature in the substrate that is more correct than the uncompensated readouts generated by both the first probe and the second probe. COPYRIGHT: (C)2007,JPO&INPIT
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