Scroll vacuum pump

摘要

The pump comprises a fixed housing (10) containing at least one fixed disc (13,14) with a spiral projection (23,24,25) on one surface, and a moving disc (30) facing the fixed disc and having at least one spiral projection (33,34,35) facing towards the fixed disc. The moving disc is connected to a circular motion mechanism comprising a drive (20) and hollow shaft (50) which is situated centrally relative to the housing (10). A second shaft (40) is connected at one end to the moving disc and is supported by the hollow shaft bearing (47). The pump has a circular motion limiter in the form of a metal bellows (60) with one end connected to the fixed housing and the other to the central shaft (40). In one variant of the design the moving disc can comprise two plates (31,32) with spiral projections facing towards the fixed disc and a flange (14) situated opposite it.