| 摘要 |
PROBLEM TO BE SOLVED: To remove an electric charge charged in a measuring system from an inspection unit such as an SMU and a VMU to a probe tip, to make a device free from being damaged, and to obtain a correct measured value. SOLUTION: A switching element 111 is provided to connect electrically fellow probe card wires, in constitution provided with the plurality of probe card wires having a probe 104 contacting with a pad for an electrode of a semiconductor device, and capable of connecting the probe card wires 102 to the plurality of inspection units and ground units in a semiconductor inspection device, and two or more of the optional probe card wires are electrically connected or interrupted by the switching element. That is, each of the plurality of probe card wires is connected to the plurality of inspection units and ground units in the corresponding semiconductor inspection device. Then, the switching element is brought into an ON-condition to connect all the inspection units to the ground units at the same time, to remove collectively the electric charges in a route from the inspection unit to the probe tip. COPYRIGHT: (C)2007,JPO&INPIT
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