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发明名称
DENDRITE THICKNESS CONTROL SYSTEM FOR GROWING SILICON RIBBON
摘要
申请公布号
EP1196646(B1)
申请公布日期
2007.08.15
申请号
EP19990904551
申请日期
1999.02.02
申请人
EBARA CORPORATION
发明人
EASOZ, JOHN, R.;MUNSHOWER, BARRY
分类号
C30B15/22;C30B29/06;C30B15/00;C30B15/26;C30B29/64
主分类号
C30B15/22
代理机构
代理人
主权项
地址
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