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发明名称
摘要
申请公布号
JP3959536(B2)
申请公布日期
2007.08.15
申请号
JP19970222098
申请日期
1997.08.19
申请人
发明人
分类号
H01L21/20;H01L21/316;H01L21/336;H01L29/786
主分类号
H01L21/20
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