发明名称 |
DRUCKSENSOR |
摘要 |
The invention relates to a pressure sensor consisting of a chip (11) which is mounted on a support wall (10) and which is provided with a resistance unit consisting of strip conductors and being arranged at the lower side (13) of a substrate (12). Said lower side faces the support wall (10). The resistance unit is located on a thin membrane (18). A recess (19) is located behind said membrane. The chip (11) is fixed on the support wall (10) by means of an elastic intermediate layer (26). The electrical components of the chip are protectively arranged between the substrate (12) and the support wall (10). The invention provides for an extremely flat sensor unit without additional sensor housing. Said sensor unit can even be used for measuring pressures in electrically conductive mediums. |
申请公布号 |
AT366917(T) |
申请公布日期 |
2007.08.15 |
申请号 |
AT19990960982T |
申请日期 |
1999.11.17 |
申请人 |
ABIOMED EUROPE GMBH |
发明人 |
SIESS, THORSTEN;NIX, CHRISTOPH |
分类号 |
G01L9/04;G01L9/06;G01L9/00;H01L29/84 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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