| 摘要 |
A method and an apparatus for forming a deposition film of an organic light emitting diode are provided to prevent sagging of a mask and a substrate and generation of particles. An apparatus for forming a deposition film of an organic light emitting diode includes a furnace(20), a scan head(30), a photo mask(40), a substrate mount, and a position fixing unit. A deposition source is contained in the furnace. The scan head includes plural nozzles which spray the deposition source from the furnace. The scan head is normally or slantingly implemented and reciprocally moved in a straight line. The photo mask is arranged to be parallel to the scan head. The substrate mount fixes a substrate(S) which is received in a horizontal direction. The position fixing unit fixes the substrate mount, so that the substrate mount is parallel to the scan head and the photo mask. |
