| 摘要 |
PROBLEM TO BE SOLVED: To make handling of an infrared ray filter easy when manufacturing and discarding it. SOLUTION: The infrared ray filter 1 includes a substrate 2 for transmitting infrared rays and Ge films and HfO<SB>2</SB>films alternately multilayer-laminated on a substrate 2 surface and the HfO<SB>2</SB>film has crystal structure with alignment in a face direction where a (111) plane and a (-111) plane are main. Since ZnS is not used thereby when multilayer film structure is formed, handling of the infrared ray filter can be made easy when manufacturing and discarding it. Further since the HfO<SB>2</SB>film has the crystal structure with alignment in the face direction where the (111) plane and the (-111) plane are main, adhesion between the Ge film and the HfO<SB>2</SB>film increases and the infrared ray filter of high strength can be provided. COPYRIGHT: (C)2007,JPO&INPIT
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