| 摘要 |
PROBLEM TO BE SOLVED: To provide a rough/fine positioning device which is inexpensive and easily manufactured. SOLUTION: The rough/fine positioning device is provided with: a rough moving mechanism for moving a moving table; a fine moving mechanism for moving the moving table at high moving accuracy than that of the rough moving mechanism; a position sensor for detecting the position of the moving table; a rough moving controller for control of the rough moving mechanism on the basis of a feedback signal from the position sensor; a fine moving controller for controlling the fine moving mechanism on the basis of the feedback signal from the position sensor; and a signal adjuster intervening in a feedback route. The signal adjuster outputs a first encode signal derived by encoding the detection signal of the position sensor by first resolution to the coarse controller, and also outputs a deviation signal indicating the deviation between a second encode signal derived by encoding the detection signal of the position sensor by second resolution and a command value signal to the fine moving controller. COPYRIGHT: (C)2007,JPO&INPIT
|
