发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device including inductors with improved reliability and a method of manufacturing the same are provided. The semiconductor device may include a substrate, an insulating film pattern formed on the substrate and having an opening, an amorphous metal nitride film formed inside the opening, a diffusion reducing or preventing film formed on the amorphous metal nitride film, and a conductive film including the diffusion reducing or preventing film filling the inside of the opening.
申请公布号 US2007181971(A1) 申请公布日期 2007.08.09
申请号 US20070703244 申请日期 2007.02.07
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK SANG-HOON
分类号 H01L29/00;H01L21/8222 主分类号 H01L29/00
代理机构 代理人
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