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发明名称
HERSTELLUNG EINER SILIZID-REGION AUF EINEM SILIZIUMKÖRPER
摘要
申请公布号
DE69837657(T2)
申请公布日期
2007.08.09
申请号
DE19986037657T
申请日期
1998.01.09
申请人
ULTRATECH INC.
发明人
TALWAR, SOMIT;VERMA, GUARAV;KRAMER, KARL-JOSEPH;WEINER, KURT
分类号
H01L21/28;H01L21/225;H01L21/265;H01L21/268;H01L21/285;H01L21/3205;H01L21/336;H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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