发明名称 |
METHOD OF ALIGNING A PARTICLE-BEAM-GENERATED PATTERN TO A PATTERN ON PRE-PATTERNED SUBSTRATE |
摘要 |
A significant improvement in the alignment of a particle-beam-generated pattern relative to a pre-existing pattern present on a substrate has been accomplished using optical measurement to register the particle beam to the pre-existing pattern. Use of a position fiducial which can be accurately measured by both an optical microscope and a particle beam axis is used to align a pre-existing pattern with a particle-beam-generated pattern during writing of the particle-beam-generated pattern. Registration of the pre- existing pattern to the fiducial and registration of the particle beam axis to the fiducial periodically during production of the particle-beam-generated pattern continually provides an improvement in the overall alignment of the pattern being created to the pre-existing pattern on the substrate. The improved method of alignment can be used to correct for drift, or thermal expansion, or gravitational sag, by way of example.
|
申请公布号 |
WO2007038134(A3) |
申请公布日期 |
2007.08.09 |
申请号 |
WO2006US36646 |
申请日期 |
2006.09.20 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SULLIVAN, JEFFREY, S.;YOUNG, TONY, TIECHENG |
分类号 |
H01J37/08;H01J27/02 |
主分类号 |
H01J37/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|