| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a composition for ferroelectric thin film formation excelling in storage stability and uniformity of a film in applying and drying it. <P>SOLUTION: Metallic alkoxide, metallic acetate, metal acetylacetonate salt, amines and an alcohol solvent are mixed, this mixture 1 is heated by using a distillation column 3, and refluxed while removing a part of an evaporant, and water is replenished, whereby a colloid solution for an MOD method is formed. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
