| 摘要 |
<p>A replacement method of treatment mechanism in a treatment apparatus and a computer readable memory medium for storing a replacement program are provided to replace stably the treatment mechanism such as a treatment cup without stopping the treatment apparatus itself. Whether a predetermined treatment is ended or not is checked, wherein the predetermined treatment is performed on a treatment object body in a treatment unit(S104). The intention of being capable of replacing a treatment mechanism of the treatment unit is displayed(S105). Whether a shutter of the treatment unit is closed or not is checked(S106). When the shutter of the treatment unit is closed, an operation stopped state of a corresponding transfer unit is dissolved(S107). At this time, other treatment units are capable of operating normally.</p> |
