发明名称 METHOD OF SEGMENTING WAFER
摘要 A wafer is provided and a front scribe line pattern is defined on a front surface of the wafer. A back scribe line pattern corresponding to the front scribe line pattern is defined on a back surface of the wafer. Then the wafer is attached to an extendable film and a wafer breaking process is performed to form a plurality of dies by virtue by extending the extendable film.
申请公布号 US2007184633(A1) 申请公布日期 2007.08.09
申请号 US20060459933 申请日期 2006.07.25
申请人 YANG CHEN-HSIUNG 发明人 YANG CHEN-HSIUNG
分类号 H01L21/00 主分类号 H01L21/00
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