发明名称 Oxide sintered body and an oxide film obtained by using it, and a transparent base material containing it
摘要 The oxide sintered body mainly consists of gallium, indium, and oxygen, and a content of the gallium is more than 65 at. % and less than 100 at. % with respect to all metallic elements, and the density of the sintered body is 5.0 g/cm<SUP>3 </SUP>or more. The oxide film is obtained using the oxide sintered body as a sputtering target, and the shortest wavelength of the light where the light transmittance of the film itself except the substrate becomes 50% is 320 nm or less. The transparent base material is obtained by forming the oxide film on one surface or both surfaces of a glass plate, a quartz plate, a resin plate or resin film where one surface or both surfaces are covered by a gas barrier film, or on one surface or both surfaces of a transparent plate selected from a resin plate or a resin film where the gas barrier film is inserted in the inside.
申请公布号 US2007184286(A1) 申请公布日期 2007.08.09
申请号 US20060604259 申请日期 2006.11.27
申请人 SUMITOMO METAL MINING CO., LTD. 发明人 NAKAYAMA TOKUYUKI;ABE YOSHIYUKI
分类号 C23C14/00;B32B17/06 主分类号 C23C14/00
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