发明名称 |
FLUOROCARBON FILM AND PROCESS FOR PRODUCING THE SAME |
摘要 |
<p>To provide a process for producing a fluorocarbon film, which is capable of constantly forming a fluorocarbon film excellent in durability and functionality. The process for producing a fluorocarbon film of the present invention is a process for producing a fluorocarbon film at least a part of which is chemically bonded to a substrate surface, and is characterized by conducting, in sequence, step (a) for applying plasma to a substrate surface in a continuous or pulse manner to form active points on the substrate surface and step (b) for applying plasma to the substrate surface in a continuous or pulse manner in the presence of a gas of a fluorocompound represented by the formula C x F y and/or C x F y O z under such a condition that active species impinge on the substrate surface at a relatively lower collision energy than in step (a).</p> |
申请公布号 |
EP1816231(A1) |
申请公布日期 |
2007.08.08 |
申请号 |
EP20050800431 |
申请日期 |
2005.11.01 |
申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
TAMITSUJI, CHIKAYA;HIGASHI, SEIJI;TATEMATSU, SHIN;OKI, SATOSHI |
分类号 |
C23C14/12;C08J7/12;C08L101/00 |
主分类号 |
C23C14/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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