AN OXIDE SINTERED BODY AND AN OXIDE FILM OBTAINED BY USING IT, AND A TRANSPARENT BASED MATERIAL CONTAINING IT

摘要

The oxide sintered body mainly consists of gallium, indium, and oxygen, and a content of the gallium is more than 65 at.% and less than 100 at.% with respect to a ll metallic elements, and the density of the sintered body is 5.0 g/cm3 or more. The oxi de film is obtained using the oxide sintered body as a sputtering target, and the shortest wavelength of the light where the light transmittance of the film itself except the substrate becomes 50% is 320nm or less. The transparent base material is obtained by forming the oxide film on one surface or both surfaces of a glass plate, a quartz plate, a resin plate or resin film where one surface or both surfaces are covered by a gas barrier film, or on one surface or both surfaces of a transparent plate selected fro m a resin plate or a resin film where the gas barrier film is inserted in the inside.