| 摘要 |
An apparatus for identifying a state of a dryer cover of a wet station device is provided to prevent a dropping effect of a robot arm in a closing state of a bath cover by sensing correctly an opening state of the bath cover. A bath(10) is used for storing a plurality of wafers. Bath covers(12a,12b) are installed at an upper side of the bath to cover an upper part of the bath. Air cylinders(14a,14b) are installed at both sides of an outer circumference of the bath to open or shut the bath covers. Floating parts(16a,16b) are coupled between the air cylinders and the bath covers to open or shut the bath covers by using linear movements of the air cylinders. Magnetic sensor(18a,18b) are installed at lower parts of the cylinders to sense dropping states of the cylinders. Dogs(26a,26b) are formed at the bath covers. Cover sensors(24a,24b) are used for sensing opening/shutting states of the bath covers according to the contact states of the dogs. A main controller(28) controls a robot arm to drop the robot arm when the magnetic sensors senses the dropping states of the air cylinders and the cover sensors senses the opening states of the bath covers.
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