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发明名称
VERFAHREN ZUR HERSTELLUNG EINER LEITERBAHNSTRUKTUR FÜR EINE INTEGRIERTE SCHALTUNG
摘要
申请公布号
DE69933933(T2)
申请公布日期
2007.08.02
申请号
DE19996033933T
申请日期
1999.07.01
申请人
APPLIED MATERIALS INC.
发明人
NAIK, MEHUL;BROYDO, SAMUEL
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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