| 摘要 |
The invention relates to an apparatus for detecting particles, comprising a support element ( 1 ) and a plurality of electrically conductive structures ( 2 ) arranged on the support element ( 1 ), wherein the structures ( 2 ) are electrically insulated from each other and wherein each of the structures ( 2 ) can be electrically connected to an electronic read-out device, wherein an angle of incidence (alpha) is given between a beam direction of the particles and the support element ( 1 ), wherein a trough ( 3 ) is in each case arranged between a first structure ( 2 ) and a structure ( 2 ) adjacent to the first structure in the beam direction, wherein there is an at least partial overlap of the first structure ( 2 ) and the adjacent structure ( 2 ) in the beam direction.
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