| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope, constituted so as to easily perform the light spot positional alignment when a cantilever is irradiated with light in a dark field illumination state, with respect to the objective lens for observing a light spot, or when the light spot is difficult to be recognized from the wavelength of ultraviolet or infrared rays. SOLUTION: In the scanning probe microscope, equipped with the cantilever 2 provided with a probe 2a, a light source 5 for irradiating the cantilever with light and a light-detecting part 6 for detecting the light reflected by the cantilever, a target plate 8, for observing the spot of the light emitted from the light source, is arranged to provide the surface of the target plate 8 with a cyclic structure or a random structure for scattering light. COPYRIGHT: (C)2007,JPO&INPIT
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