发明名称 |
PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER WITH AIR-BACKED CAVITIES |
摘要 |
A piezoelectric micromachined ultrasonic transducer comprising a substrate and a first dielectric film formed on the substrate. An opening having a sidewall is formed through the substrate and first dielectric film. A bottom electrode is formed on the first dielectric film spanning the opening. A piezoelectric element is formed on the bottom electrode. A second dielectric film surrounds the piezoelectric element. A conformal insulating film is formed on the sidewall of the opening. A conformal conductive film is formed in contact with the bottom electrode and on the sidewall of the opening, wherein an open cavity is maintained in the opening. A top electrode is formed in contact with the piezoelectric element. |
申请公布号 |
WO2006093913(A3) |
申请公布日期 |
2007.08.02 |
申请号 |
WO2006US06939 |
申请日期 |
2006.03.01 |
申请人 |
RESEARCH TRIANGLE INSTITUTE;DAUSCH, DAVID, EDWARD |
发明人 |
DAUSCH, DAVID, EDWARD |
分类号 |
H01L41/00 |
主分类号 |
H01L41/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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