PROBER CHUCK FOR MAGNETIC MEMORY, AND PROBER FOR MAGNETIC MEMORY PROVIDED WITH SAID CHUCK

摘要

Provided is a prober chuck capable of performing a low-leak evaluation of a magnetic memory in an environment in which a magnetic field is applied. A magnetic-memory prober chuck (1) holds a wafer (W) on which a magnetic memory is formed. The chuck (1) has: a chuck top (10) formed of a conductive material and having the wafer (W) mounted thereon; an insulating layer (11) formed of an insulating material and adapted for supporting the bottom surface of the chuck top (10); and a guard layer (12) formed of a conductive material, disposed below the insulating layer (11), and insulated from the chuck top (10) by the insulating layer (11). All the members constituting the chuck (1), including the chuck top (10) and the guard layer (12), are composed of a non-magnetic material.