| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact high-performance dynamic quantity sensor capable of preventing disconnection in a post, securing conductivity surely, and miniaturizing the post, and to provide a method of manufacturing the same. SOLUTION: In a gyro sensor 1, conductivity in the post 41 can be easily secured by forming the post 41 having the thickness similar to an SOI substrate 20 by using a conductive material. In the gyro sensor 1, formation of a V-groove for securing conductivity in the post 41 which is necessary when forming the post by using the SOI substrate 20 becomes unnecessary by forming the post 41 by using the conductive material, and the size of the post can be reduced, to thereby enable miniaturization of the gyro sensor 1. COPYRIGHT: (C)2007,JPO&INPIT
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