PRESSURE SENSOR DEVICE AND FLUID CONTROL DEVICE HAVING BUILT-IN PRESSURE SENSOR
摘要
<p>Provided are a pressure sensor device and a fluid control device having a built-in pressure sensor capable of realizing a compact integrated fluid control device in which a pressure sensor alone can be easily replaced. A pressure sensor device (21) includes: a first channel block (22) having a predetermined channel (22a); a second channel block (23) having a predetermined channel (23a) and opposing to the first channel block (22) at a predetermined interval; and a pressure sensor (24) arranged on an opposing surface of the first channel block (22) or the second channel block (23) for detecting the fluid pressure in an internal channel (23b). These components are integrated in a pressure regulator (16).</p>
