| 发明名称 |
METHODS OF PREVENTING DEFECTS IN ANTIREFLECTIVE COATINGS |
| 摘要 |
A method of forming a relief image on a substrate including: applying over a substrate a layer of an antireflective coating; and vacuum processing the antireflective coating. This method reduces the number of pinhole defects present in the antireflective coating.
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| 申请公布号 |
US2007178404(A1) |
申请公布日期 |
2007.08.02 |
| 申请号 |
US20060307268 |
申请日期 |
2006.01.30 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BRODSKY COLIN J.;BRODSKY MARY JANE;LI WAI-KIN;SCHEER STEVEN A. |
| 分类号 |
G03C1/00 |
主分类号 |
G03C1/00 |
| 代理机构 |
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