| 摘要 |
PROBLEM TO BE SOLVED: To provide a mixed gas manufacturing apparatus capable of accurately and stably maintaining a composition of a product, i.e., a mixed gas regardless of variation in the composition of the mixed gas becoming a material and a flow rate of the product mixed gas used, and a method. SOLUTION: A pressure of the material gas comprising the mixed gas is adjusted to a set pressure, a pressure of an addition gas is adjusted to a set pressure and the flow rate is adjusted. The material gas adjusted to the set pressure and the addition gas adjusted to the set pressure and flow rate-adjusted are mixed to create the product mixed gas. A part of the product mixed gas is taken out, a concentration of at least one kind of gas in the product mixed gas is measured and a flow rate of the product mixed gas is measured. The flow rate of the addition gas is adjusted from the concentration of at least one kind of gas of the previously set product mixed gas, a concentration measurement value of at least one kind of gas in the product mixed gas and a variation ratio of the flow rate measurement value of the product mixed gas. COPYRIGHT: (C)2007,JPO&INPIT
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