| 摘要 |
Disclosed is a load-lock system, an exposure apparatus having the same, and a load-lock method. In one preferred form, the load-lock system includes a chamber housing, and a capacity changing system for changing the capacity of the chamber housing. The load-lock method includes the steps of conveying an object into a chamber housing, reducing the capacity of the chamber housing after the conveying step, and reducing the pressure inside the chamber housing after the capacity reducing step.
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