Microelectromechanical system

摘要

The accelerometer has fasteners (21) attaching an electromechanical active part (5) to bases (6) and allowing displacement of the active part with respect to the bases. The active part is isolated from all mechanical forces which the bases undergo, particularly torsions or flexions, when the accelerometer is fixed on a support (8). Girders (27) limit the amplitude of movements of the part (5) relative to the bases. An independent claim is also included for a device including a microelectromechanical system and a support.