| 摘要 |
A piezoelectric pump (6) includes a casing (32) formed of a plurality of metallic members welded and thus joined together, a piezoelectric element (36) dividing an internal space of the casing (32) into a working space (34) and a back pressure space (35), and internal components (33A, 33B) formed of resin, and provided between the casing (32) and the piezoelectric element (36) and holding the piezoelectric element (36). The internal components (33A, 33B) are formed of workable and moldable resin. The internal component (33A) defines a perimeter of the working space (34) and the internal component (33B) defines a perimeter of the back pressure space (35). The internal components (33A, 33B) are arranged opposite each other to form a recess therebetween to receive and thus hold the piezoelectric element (36) therein.
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