METHOD OF TRIMMING A CENTER WAVE OF A ARRAYED WAVEGUIDE GRATING DEVICE

摘要

A method for trimming a center wavelength of an AWG(Arrayed Waveguide Grating) device is provided to trim the center wavelength without using a temperature controller by adjusting the refractive index of an upper polymer clad layer through irradiation of UV(Ultraviolet) laser beams on a portion of the upper polymer clad layer. A method for trimming a center wavelength of an AWG device is composed of steps for forming a lower clad layer(202) on a substrate(201); forming a core(203) on the lower clad layer in a predetermined pattern; forming an upper clad layer(204) on the core by using polymer materials; and irradiating a UV laser beam on a region of the upper clad layer in order to trim the center wavelength by changing the refractive index of the upper clad layer.