PULSED LASER DEPOSITION APPARATUS FOR LASERWINDOW PREVENTING CONTAMINATION

摘要

A pulsed laser deposition apparatus having a function of preventing a laser window from being contaminated is provided to uniformly supply the laser beam energy by forming a plume screen part in the laser window. A plume screen part(100) is formed between a plume(8) and a laser window(3). The plume screen part includes a body(110) formed on a laser window port to be communicated with a vacuum chamber(2), and laser beam passes through the body. The laser window is provided on a front end of the body onto which the laser beam is incident. A screen(120) is formed in the body of the laser window to prevent contamination of the laser window.