APPARATUS AND METHOD FOR TESTING SEMICONDUCTOR TEST SYSTEM

摘要

A test apparatus and a method for detecting malfunction of a test system are provided to reduce costs required for a test process by rapidly detecting a defect of the system and a defect position thereof. A tester is adapted to perform a test operation on a semiconductor wafer, and an interface unit is adapted to interface between the tester and the semiconductor wafer. A conductive plate provides the interface unit with a current path when the interface unit is determined to be defective. The interface unit has a pogo connector(120) having plural pogo pins and a probe card(130) connected with the tester through the pogo connector. The conductive plate is formed on one of chip regions of the semiconductor wafer.