COMPOSITION EVALUATING METHOD AND PHYSICAL PROPERTY EVALUATING METHOD OF NITRIDING SILICON OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To easily evaluate composition and composition distribution in the minute region of nitriding silicon oxide film without destroying it. SOLUTION: In the evaluating method of composition of the nitriding silicon oxide film 2 formed on a substrate 1, the composition or the composition distribution of the nitriding silicon oxide film 2 is evaluated by measuring and analyzing a photoluminescence spectrum employing laser as a light source therefor. COPYRIGHT: (C)2007,JPO&INPIT