| 摘要 |
PROBLEM TO BE SOLVED: To enhance the rigidity of a supporting part for a diaphragm, and efficiently transmit the displacement of a piezoelectric element to the diaphragm, in a method for forming a thin-film piezoelectric-substance actuator for use in an inkjet. SOLUTION: This actuator is composed of the piezoelectric element and the diaphragm, which are formed on a substrate; a part, corresponding to the piezoelectric element, of the substrate partially forms a space; and the piezoelectric element on the substrate is covered with the diaphragm. The actuator is characterized as follows: the diaphragm and the supporting part for the diaphragm are composed of a plated metal; the diaphragm is thicker than the supporting part; and a side surface of the piezoelectric element is not brought into contact with the diaphragm. COPYRIGHT: (C)2007,JPO&INPIT
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