| 摘要 |
A microstructure, suitable for avoiding sticking phenomena, includes a base, a first structural portion joined to the base, and a second structural portion opposed to the base and having a fixed end fixed to the first structural portion. Such a microstructure is made by a method including the step of processing a material substrate having a stacked structure made of a first layer, a second layer, and an intermediate layer between the first and second layers. By this method, the first layer is formed with the first structural portion, the second structural portion having the fixed end fixed to the first structural portion, and a support beam bridging the first and second structural portions. Thereafter, wet etching is performed to remove a region of the intermediate layer between the second layer and the second structural portion, followed by a drying step, and a cutting step with respect to the support beam.
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