发明名称 DUST REMOVAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a dust removal device capable of efficient dust removal, miniaturization of the whole device and cost reduction. SOLUTION: The dust removal device comprises a rotary brush whereby dust adhering to a work is removed, a work conveying means for conveying the work in the direction which intersects the direction of an axis of the rotary brush, a brush rotary means for rotating the rotary brush around the axial center, and a brush reciprocation means for making the rotary brush reciprocate in the direction of the axis. It has a motor used as a common source for driving the brush rotary means and the brush reciprocation means. The brush rotary means has a power transmission means for transmitting the power of the motor to the rotary brush as rotational movement of the rotary brush. The brush reciprocation means has a power transmission means for transmitting power to the rotary brush by converting the power of the motor into the reciprocation movement of the rotary brush. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007189036(A) 申请公布日期 2007.07.26
申请号 JP20060005363 申请日期 2006.01.12
申请人 NIX INC 发明人 NAKADA ATSUNORI;OYAMA JUNSHI
分类号 H01L21/304;B08B1/02;B08B1/04 主分类号 H01L21/304
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