发明名称 THIN-FILM CIRCUIT DEVICE, METHOD FOR MANUFACTURING THIN-FILM CIRCUIT DEVICE, AND ELECTRONIC APPARATUS
摘要 A thin-film circuit device includes a substrate and a thin-film circuit layer, disposed on the substrate, having an element region and a low-strength region. The element region includes thin-film elements. The low-strength region extends between an end portion of the thin-film circuit layer and the element region and has a mechanical strength less than that of the surroundings of the low-strength region.
申请公布号 US2007173031(A1) 申请公布日期 2007.07.26
申请号 US20070625978 申请日期 2007.01.23
申请人 SEIKO EPSON CORPORATION 发明人 KODAIRA TAIMEI;UTSUNOMIYA SUMIO
分类号 H01L21/76 主分类号 H01L21/76
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