发明名称 Methods of forming a plurality of capacitors
摘要 The invention includes methods of forming a plurality of capacitors. In one implementation, a plurality of capacitor electrode openings is formed over a substrate. Individual of the capacitor electrode openings are bounded on a first pair of opposing sides by a first capacitor electrode-forming material at one elevation and on a second pair of opposing sides by a different second capacitor electrode-forming material at the one elevation. Individual capacitor electrodes are formed within individual of the capacitor electrode openings. The capacitor electrodes are incorporated into a plurality of capacitors. Other aspects and implementations are contemplated.
申请公布号 US2007173030(A1) 申请公布日期 2007.07.26
申请号 US20070724500 申请日期 2007.03.14
申请人 MICRON TECHNOLOGY, INC. 发明人 MANNING H. M.
分类号 H01L21/20;H01L21/8242 主分类号 H01L21/20
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