| 摘要 |
PROBLEM TO BE SOLVED: To recognize whether the flaw of the pattern of the TFT circuit on a glass substrate, which is used in a flat panel type display, such as a liquid crystal display, a plasma display, an organic EL device, etc., is a short flaw or an open flaw, when foreign matters are bonded to a substrate. SOLUTION: The reflected illumination light 34, from a reflecting light source 33, is guided to the panel 31 on a stage 30 by a half mirror 32 and the reflected light from the panel 31 is captured by a first imaging camera 38. The transmitted observation image of a panel 31 is fetched by the transmitted light 43, from a transmission light source 42 on the under side of the stage 30, and the transmitted observation image is captured by a second imaging camera 37 through the half mirror 32. The image signal from a first imaging camera 38 and the image signal from a second imaging camera 37 are processed by an image control unit 39, to discriminate whether the pattern is a short flaw or an open flaw, when a foreign matter is bonded to the substrate 31. COPYRIGHT: (C)2007,JPO&INPIT
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