METHOD FOR SURFACE TREATMENT WITH ELECTRON BEAM AND APPARATUS FOR SURFACE TREATMENT WITH ELECTRON BEAM

摘要

This invention provides a method for surface treatment with an electron beam, which can finish the surface of an object in a relatively short time to a fine surface roughness level of about 1 µm evenly over the whole treatment object region to be surface treated, and an apparatus for surface treatment with an electron beam. In exposing the surface of an object W to be treated to an electron beam to melt and solidify the surface layer for surface treatment, region information defining a treatment object region to be surface treated in the object W is previously registered in a treatment object information memory (19), and, based on the region information, an electron beam is scanned in a two-dimensional scanning manner in the treatment object region in the object W so as to draw a flexure line trajectory.