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发明名称
摘要
申请公布号
JPS4520829(Y1)
申请公布日期
1970.08.20
申请号
JP19660109262U
申请日期
1966.11.30
申请人
发明人
分类号
(IPC1-7):H01L21/02;B01L9/00;B25B9/02;H01L21/302
主分类号
(IPC1-7):H01L21/02
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